Specifications
| Item | Description |
|---|---|
| Chamber Dimensions | Φ150 × 70㎜ |
| Sample Stage, Load Number | Φ10 ㎜ × 35, Φ15 ㎜ × 10, Φ30 ㎜ × 5 |
| Touch Screen | ○ |
| Vacuum Holding Function During OFF | ○ |
| Sublimation Cylinder Open/close Detection | ○ |
| Baffle Valve | × |
| Consumption Current | AC 100-240V Max. 10A (Including vacuum pump start-up) |
| Weight | 22 kg |
| Max Power Consumption | 1 kW |
| Dimensions of Main Unit | 390 (W) ×385 (D) ×435 (H) mm |
| Bell Jar | Well-sealed O ring type |
| Rated power frequency | 50/60 Hz |
| Fuse | Glass Tube (Φ6.4×30mm)10A |
Functions
| Automatic Exhaust | Gas replacement in chamber (vacuum drawing 30 sec/pump stop 10 sec x3) After entering the passcode, the chamber will be purged with atmospheric air (vacuum for 10 sec/pause for 3 sec, repeated twice). |
| Current Value Setting | 0.1～10.0mA（Maximum current limit: 30mA） |
| Film Thickness Setting | 0.5nm～ |
| Auto | Film thickness setting only. No cumulative coating. |
| Manual | Coating time, current value, and gas filling time settings as desired |
| EJECT | Vacuum for 120 sec, pause for 10 sec, vacuum for 20 sec, pause for 10 sec, vacuum for 20 sec (Total: 180 sec) |
| INSERT | Forced exhaust ：～2Pa |
| Finish | Forced exhaust ：～2000Pa |
| Ampule Replacement | Forced exhaust ：～2Pa + Automatic exhaust for 30 minutes |
